Unable to create/delete workspace -- text file busy

Whenever I try to create or delete a workspace in my self-hosted Coder, I get this error:

Initializing the backend...
Initializing provider plugins...
- Reusing previous version of hashicorp/kubernetes from the dependency lock file
- Reusing previous version of coder/coder from the dependency lock file
- Installing hashicorp/kubernetes v2.32.0...
- Installed hashicorp/kubernetes v2.32.0 (signed by HashiCorp)
- Installing coder/coder v1.0.1...
Error: Failed to install provider
Error while installing coder/coder v1.0.1: open
/home/coder/.cache/coder/provisioner-1/tf/registry.terraform.io/coder/coder/1.0.1/linux_amd64/terraform-provider-coder_v1.0.1:
text file busy

Initializing the backend...
Initializing provider plugins...
- Reusing previous version of hashicorp/kubernetes from the dependency lock file
- Reusing previous version of coder/coder from the dependency lock file
- Installing hashicorp/kubernetes v2.32.0...
- Installed hashicorp/kubernetes v2.32.0 (signed by HashiCorp)
- Installing coder/coder v1.0.1...
Error: Failed to install provider
Error while installing coder/coder v1.0.1: open
/home/coder/.cache/coder/provisioner-1/tf/registry.terraform.io/coder/coder/1.0.1/linux_amd64/terraform-provider-coder_v1.0.1:
text file busy